
Mark G. Allen
· Alfred Fitler Moore Professor of ESEUniversity of Pennsylvania · Aerospace Engineering and Engineering Mechanics
Active 1983–2026
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About
Professor Mark G. Allen is the Director of the MicroSensors and MicroActuators (MSMA) Group at the University of Pennsylvania. He holds the Alfred Fitler Moore Professorship and is a faculty member in the Electrical and Systems Engineering department, which is his primary appointment. Additionally, he is affiliated with the Mechanical Engineering and Applied Mechanics department. Professor Allen also serves as the Chair of the Electrical and Systems Engineering department. The MSMA Group under his leadership focuses on research in microsensors and microactuators, with ongoing projects involving postdoctoral fellows and graduate students working on topics such as magnetics, microfabrication, in-soil nutrient sensing, biodegradable batteries, magnetic energy harvesting, and biosensors.
Research topics
- Political Science
- Electrical engineering
- Materials science
- Engineering
- Nanotechnology
- Biology
- Immunology
- Organic chemistry
- Endocrinology
- Composite material
Selected publications
ACS Applied Materials & Interfaces · 2023 · 30 citations
Senior authorCorresponding, respectively. The batteries described in this work are manufactured in an open environment and fabricated using a straightforward layer-by-layer method, enabling the potential for high fabrication throughput in a MEMS-compatible fashion.
Science Advances · 2021 · 29 citations
A non-faradaic label-free cortisol sensing platform is presented using a nanowell array design, in which the two probe electrodes are integrated within the nanowell structure. Rapid and low volume (≤5 μl) sensing was realized through functionalizing nanoscale volume wells with antibodies and monitoring the real-time binding events. A 28-well plate biochip was built on a glass substrate by sequential deposition, patterning, and etching steps to create a stack nanowell array sensor with an electro…
Vertically integrated high voltage Zn-Air batteries enabled by stacked multilayer electrodeposition
Journal of Power Sources · 2020 · 22 citations
Senior authorCorrespondingA Tunable Magnetic Bias Circuit With Zero Static Power Consumption
IEEE Magnetics Letters · 2025-01-01 · 2 citations
articleSenior authorQuasi-static magnetic fields can be used to modulate the magnetic and electrical properties of many magnetic materials, thereby enabling the operation of various magnetic devices, such as multiferroic magnetic field sensors and ferro/ferrimagnetic magneto-static wave filters. We present a magnetic circuit designed to produce a tunable dc magnetic bias field and detail its operating principle. The magnitude of the bias field can be electrically tuned to achieve a desired magnetic field; when not…
Fabricaton of Through-Silicon-Via Inductors for High-Frequency Vertical Power Delivery
2025-06-29 · 2 citations
articleSenior authorThis paper presents the fabrication of through-silicon-via (TSV) inductors for high-frequency vertical power delivery. To fabricate such inductors, magnetic material is introduced into TSVs by electrodepositing magnetic film onto the TSV sidewalls. A self-aligned process defines the electrodeposited magnetic film to form the cores of the TSV inductors without requiring photolithography. Subsequent copper filling of the vias provides a low-resistance vertical current path, completing the inductor…
Recent grants
NNCI: Mid-Atlantic Nanotechnology Hub (MANTH)
NSF · $5.3M · 2020–2026
NIH · $100k · 2001
NNCI: Mid-Atlantic Nanotechnology Hub (MANTH) for Research, Education, & Innovation
NSF · $5.0M · 2015–2021
Frequent coauthors
- 64 shared
David M. Sonnenfroh
- 59 shared
Sophia Muirhead
Institute of Electrical and Electronics Engineers
- 59 shared
Juan Hernández-Cordero
Institute of Electrical and Electronics Engineers
- 59 shared
Thomas Siegert
University of West Florida
- 59 shared
Thomas Coughlin
Xi'an Jiaotong University
- 59 shared
Jamie Moesch
Arizona State University
- 59 shared
John C. Cartledge
Human Resources Research Organization
- 59 shared
Steven Heffner
Spectrum Research (United States)
Labs
Education
- 1988
Ph.D., Electrical Engineering
University of Pennsylvania
- 1983
M.S., Electrical Engineering
University of Pennsylvania
- 1981
B.S., Electrical Engineering
University of Pennsylvania
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